Question

What is the resolution limit for a projection type of photolithographic system if the incident wavelength is 365 nm (the i-line of Hg), N.A.=0.63, and k1=0.6. what is the Depth of field needed for the best resolution?

Answer 1

Depth of field = 347.619 nm

Step-by-step explanation:

wavelenght = 365nm

N.A =0.63

k1= 0.6

so we have that the resolution limit is:

R=k1*A

R=0.6*365

R=219 nm

and the Depth of field needed for the best resolution is:

DoF = Resolution / N.A.

DoF= R/N.A

DoF= 219/0.63

DoF= 347.619 nm