Consider a fully-clamped circular diaphragm poly-Si with a radius of 250 μm and a thickness of 4 μm. Assume that Young’s modulus is 130 GPa and Poisson’s ratio is 0.3. A uniform pressure of 20 kPa is applied.

Consider a fully-clamped circular diaphragm poly-Si with a radius of 250 μm and a thickness of 4 μm. Assume that Young’s modulus is 130 GPa and Poisson’s ratio is 0.3. A uniform pressure of 20 kPa is applied.

(a) What is the stress at the center of the diaphragm?
(b) What is the radial stress at the fully-clamped edge of the diaphragm?
(c) What is the transverse stress at the fully-clamped edge of the diaphragm?
(d) What is the amount of deflection at the center of the diaphragm?

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Consider a fully-clamped circular diaphragm poly-Si with a radius of 250 μm and a thickness of 4 μm. Assume that Young’s modulus is 130 GPa and Poisson’s ratio is 0.3. A uniform…

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