Register
The ratio of the rate of etch-product formation to the flow rate of etch gas should be greater than 0.15 for uniform etching. Suppose a 200 mm diameter silicon wafer is etched at a rate of 50.0 nm/min
101k views
2 votes
The ratio of the rate of etch-product formation to the flow rate of etch gas should be greater than 0.15 for uniform etching. Suppose a 200 mm diameter silicon wafer is etched at a rate of 50.0 nm/min in a CF4 plasma.(a) How many Si atoms are removed per minute?(b) What evolution rate of SiF4 does this correspond to in standard cubic centimeters per minute?(c) What minimum flow rate of CF4 should be maintained?

User Oxon
by
5.4k points

1 Answer

3 votes

Answer:

answer for the question :

The ratio of the rate of etch-product formation to the flow rate of etch gas should be greater than 0.15 for uniform etching. Suppose a 200 mm diameter silicon wafer is etched at a rate of 50.0 nm/min in a CF4 plasma.(a) How many Si atoms are removed per minute?(b) What evolution rate of SiF4 does this correspond to in standard cubic centimeters per minute?(c) What minimum flow rate of CF4 should be maintained? "

is explained in the attachment.

Step-by-step explanation:

The ratio of the rate of etch-product formation to the flow rate of etch gas should-example-1
The ratio of the rate of etch-product formation to the flow rate of etch gas should-example-2
User Atedja
by
5.8k points
Ask a Question
Welcome to QAmmunity.org, where you can ask questions and receive answers from other members of our community.

6.3m questions

8.3m answers

Other Questions

A piston-cylinder device fitted with stops in the cylinder walls contains 2.1 kg of water initially at 150 kPa and 30 °C. Heat is transferred to the system until the final temperature reaches 250 °C. The
A water towers lowest point is 405 ft and the main line is 6 feet below the ground. The ground elevation is at 276 ft. The main line travels 2.9 miles. The pipe will travel through the following flanged
An activated sludge plant is being designed to handle a feed rate of 0.438 m3 /sec. The influent BOD concentration is 150 mg/L and the cell concentration (MLVSS) is 2,200 mg/L. If you wish to operate the
The bulk modulus of a fluid if it undergoes a 1% change in volume when subjected to a pressure change of 10,000 psi is (a) 0.01 psi (b) 0.001 psi (c) 0.00001 psi (d) 0.000001 psi (e) none of these
A car has an initial speed of 10 m/s. It then undergoes a constant acceleration of 0.05 m/s^2 over a distance of 5 km. Determine: a) The car final speed. b) The time needed to travel the 5 km.
Link Copied!