Question

Phosphorus is implanted into silicon. The implant parameters are a dose of 1015cm-2at an energy of 150keV.a)Find the depth of the peak of the implant profile and its value at that depth.b)If the wafer originally had 1016cm-3of boron uniformly distributed throughout, find the depth(s) at which the concentration of phosphorus is equal to the concentration of boron.

Answer 1

a) ≈ 4.99 / cm^3

b) 0.515 um

Step-by-step explanation:

Given data:

energy = 150 Kev

dose of 10^15 cm^-2

A) find the depth of the peak of the implant profile and its value at that depth

expression for implant profile = written below in the attached file

value of the peak depth ≈ 4.99 / cm^3

B ) determine the depth at which the concentration of phosphorus is equal concentration of boron

= 0.515 um

attached below is the detailed solution to the problem