Final answer:
Chem misregistration type 2 'out phase' refers to a consistent misalignment of patterns in printing or photolithography, particularly in semiconductor fabrication. It can be caused by inaccuracies in pattern projection systems, substrate deformation, or overlay alignment errors. Technicians use precise alignment techniques to mitigate such issues.
Step-by-step explanation:
The term "Chem misregistration (type 2) 'out phase'" typically refers to an issue in the field of printing or photolithography, particularly in the process of layering patterns on semiconductor wafers. This occurs when there is a misalignment between different chemical patterns that are supposed to be stacked upon one another during the fabrication process. The 'out phase' aspect implies that the misalignment is periodic and consistent, suggesting that the entire pattern is shifted in a regular manner across the substrate.
Several factors can cause Chem misregistration. It may result from inaccuracies in the stepper or scanner that projects the patterns, from substrate deformation, or from errors in the overlay alignment system. Maintaining precise alignment is critical in semiconductor manufacturing, as even minute errors can lead to defects that impact the performance of the final product.
To prevent this issue, engineers employ various alignment techniques and quality control measures, including real-time monitoring and calibration, to ensure that each layer is perfectly registered to the preceding layers.