Final answer:
The term that represents MEMS in modern technological applications is 'Micro Machines'. They combine electrical and mechanical components at a microscale and are distinct from related fields such as nanoengineering and microscale robotics.
Step-by-step explanation:
Microelectromechanical systems (MEMS) are integrated systems that combine electrical and mechanical components at a microscale. They are used in a variety of modern technological applications due to their small size and efficiency. The term that represents MEMS used in modern technological applications is d) Micro Machines. This is because MEMS can be thought of as miniaturized machines that perform specific tasks. While nanoengineering and microscale robotics are closely related fields, they are not terms specifically used to describe MEMS. Microelectronics refers to the design and development of small electronic systems, which can be a part of MEMS but does not represent the entirety of what MEMS encompass.