Final answer:
Higher substrate temperatures and lower deposition rates favor epitaxial growth, as they encourage the mobility of adatoms for proper lattice arrangement and give them time to find optimal lattice sites.
Step-by-step explanation:
The question at hand concerns factors that affect epitaxial growth, which is a process where a crystalline film or layer is deposited on a crystalline substrate. In epitaxial growth, it is typically preferred to have higher substrate temperatures and lower deposition rates. High temperatures improve the mobility of adatoms (atoms on the substrate surface), promoting proper crystal lattice arrangement and reducing defects. On the other hand, low deposition rates give adatoms more time to find optimal sites on the crystal lattice, contributing to a more orderly growth. Conversely, low temperatures and high deposition rates can lead to a disordered structure with more imperfections and potential mismatches between the layers.