Final answer:
Photolithography, soft lithography, and micromachining are techniques used in microfabrication to create microscale patterns and structures. Photolithography uses light to transfer a pattern onto a substrate, soft lithography uses elastomeric materials to create structures, and micromachining involves the removal of material to create structures.
Step-by-step explanation:
Photolithography, soft lithography, and micromachining are techniques used in microfabrication to create microscale patterns and structures. Photolithography is a process that uses light to transfer a pattern onto a substrate. It involves the use of a photoresist material that undergoes a chemical reaction when exposed to light, creating a pattern that can be etched onto the substrate.
Soft lithography is a set of techniques that use elastomeric materials to create microscale structures. It involves the use of a mold, typically made of polydimethylsiloxane (PDMS), that is used to transfer a pattern onto a substrate. Soft lithography offers more flexibility and versatility compared to other techniques, as it allows for the creation of complex structures and the use of different materials.
Micromachining, on the other hand, is a technique that involves the removal of material from a substrate to create microscale structures. It often involves the use of mechanical tools, such as lasers or milling machines, to selectively remove material. Micromachining is commonly used in the fabrication of devices such as microelectromechanical systems (MEMS), where precise control over the shape and size of the structures is important.