Answer:
Photosynthesis
Step-by-step explanation:
Cyanobacteria were the first prokaryotic organisms capable of oxygen-evolving complex. Photosynthesis needs an electron source, in this case water (H2O). By photo-oxidation of the water, oxygen (O2) is released (and hydrogen taken).
This led to the accumulation of oxygen in the atmosphere where it got to similar concentrations as in these days.