Answer:
(A) elemental, alloy, or compound thin films are deposited on to a bulk substrate
Step-by-step explanation:
In film deposition there is process of depositing of material in form of thin films whose size varies between the nano meters to micrometers onto a surface. The material can be a single element a alloy or a compound.
This technology is very useful in semiconductor industries, in solar panels in CD drives etc
so from above discussion it is clear that option (a) will be the correct answer